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MFC
Mykrolis FC280
Mykrolis FC2901
Mykrolis FC2901M
Mykrolis FC2921
Mykrolis FC2926
Mykrolis VC4901M
Phocos i300
Phocos i400
Phocos i500
Phocos i600
Phocos i700
MFC READOUT UNIT
MINI PROBE STATION
GAS SENSOR SYSTEM
CONTACT US
MINI PROBE STATION
MPS Series - SENFLOW
PROBE STYLE ( 2 CH ~ 8 CH )
SIZE ( mm )
160 ( 140 )W X 100 ( 80 )D X 50 ( 40 )H
TEMPERATURE
RT ~ 900 ℃
HEATER
SILICON NITRIDE TYPE ( WITH ALUMINA PAD )
PROBE
MANUAL P
ROBE BEND TYPE ( ∅ 0.5 X 30mmL )
TUNGSTEN ( GOLD PLATED )
PROBE STYLE ( 12 CH )
SIZE ( mm )
160 ( 140 )W X 100 ( 80 )D X 50 ( 40 )H
TEMPERATURE
RT ~ 900 ℃
HEATER
SILICON NITRIDE TYPE ( WITH ALUMINA PAD )
PROBE
MANUAL PROBE BEND TYPE ( ∅ 0.5 X 30mmL )
TUNGSTEN ( GOLD PLATED )
POGO PIN STYLE ( 32 CH )
TEMPERATURE
RT ~ 450 ℃ ( COOLANT REQUIRED for CHAMBER COVER )
HEATER
CATRIDGE TYPE ( WITH ALUMINA PAD )
PROBE
POGO PIN
PROBE STYLE ( 20 CH )
SIZE ( mm )
200 ( 180 )W x 60 ( 40 )D
TEMPERATURE
RT ~ 900 ℃
HEATER
SILICON NITRIDE TYPE ( WITH ALUMINA PAD )
PROBE
MANUAL PROBE BEND TYPE ( ∅ 0.5 X 30mmL )
TUNGSTEN ( GOLD PLATED )
MINI PROBE STATION
Gallery
8CH PROBE STATION
8CH PROBE STATION
MPS with MICROSCOPE
32CH POGO PIN STATION
9CH MULTI GAS SENSOR CHAMBER
4CH PROBE STATION
DIFFUSION CELL CHAMBER
PROBE STATION APPEARANCE
VACUUM CHAMBER
MPS with MICROSCOPE
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S E N S O R & F L O W C O N T R O L S Y S T E M