MYKROLIS Mass Flow Controllers & Meters
FC 280 Series
5 SCCM ~ 30 SLPM
FC 2900 Series
3 SCCM ~ 30 SLPM
FC 2900M Series
3 SCCM ~ 30 SLPM
FC 2920 Series
30 SLPM ~ 200 SLPM
FC 2925 Series
200 SLPM ~ 1000 SLPM
VC 4900M Series
10 SCCM ~ 30 SLPM
PHOCOS Mass Flow Controllers & Meters
i 300 Series
5 SCCM ~ 30 SLPM
i 400 Series
30 SLPM ~ 50 SLPM
i 500 Series
30 SLPM ~ 100 SLPM
i 600 Series
30 SLPM ~ 200 SLPM
i 700 Series
200 SLPM ~ 1000 SLPM
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S E N S O R & F L O W C O N T R O L S Y S T E M