The i-400 series elastomer-sealed mass flow controller accurately and reliably measures and controls gas flows based on mass. It’s thermal differential flow sensor is independent of pressure and temperature changes, unlike volumetric based flow devices that must measure pressure and temperature in order to report a mass flow. It provides fast setpoint response over a wide operating range and remains linear independent of gas type. For applications requiring precise gas flow control, the i-400 series delivers outstanding versatility and performance.

Process Values
Designed to meet the exacting requirements of semiconductor processes and equipment, the i-400 series models are premium quality elastomer-sealed mass flow controllers and meter. These mass flow controllers combine proven components and techniques with innovative concepts in both mechanical and electrical design.

Accuracy
i-400 series models thermal differential flow sensor provides highly accurate and repeatable mass measurement of gas flow. Because the sensor measures the mass flow of gas, it is independent of pressure and temperature changes. This ensure that flows are consistent in different systems or locations.

Fast setpoint response
The flow sensing circuity in the i-400 series provides response to setpoint changes as fast as 2.0 seconds, which is crucial for short process cycles. The settling time to 2% of setpoint is less than two seconds.

Adjustable, normally-closed valve
The normally-closed solenoid valve used in the i-400 series can be adjusted to a wide pressure differential operating range providing better “ fit” to application performance. Standard pressure differential range is 20-60 PSID to 50 slpm N2 and 15-40 psid up to 30 slpm N2. The hex adjusting nut located on top of the valve is easily adjusted in the system if needed.

Corrosion resistant materials
Materials in the gas path include 316 and 446 stainless steel and Teflon with a selection of viton, Kalrez or Neoprene seals.
These materials permit use of corrosive gases, such as HCL, CL2 and NH3.